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Spot size and lateral resolution of sheet resistance measurements
In measuring sheet resistance, the measurement spot size can be critical for optimum edge exclusion and for detecting small variations. However, the effective spot size can change drastically, depending on the specific probe head of the sheet resistance measurement tool. Join Filmetrics Sr. Application Scientist Walt Johnson, as he discusses contributing factors in probe head design to the effective spot size and resulting measurement data. Various probe heads will be covered, along with actual measurement results showing sheet resistance data taken at different sample dimensions.

Oct 20, 2021 09:00 AM in Pacific Time (US and Canada)

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Speakers

Jim Elman
Applications Manager @KLA Instruments
Jim Elman is an Applications Manager of profiler and thin film products for Filmetrics (a KLA company). Previous to Filmetrics he worked at the Eastman Kodak Research Labs starting in 1978. There he was an expert in spectroscopic ellipsometry, spectral reflectance, adhesion science, and XPS. He joined Filmetrics in 2007 as a Senior Applications Engineer. Jim has a B.Sc. (Honours) from the University of Toronto and a Ph.D. (in polymer science) from the University of Connecticut. He has been granted 24 US patents.