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Automated Defect Detection, Mapping and Characterization with the Zeta 3D Optical Profiler
This webinar will discuss detecting, mapping, and insitu optical characterization of defects using the Zeta non-contact 3D surface topography measurement system. The Zeta platform is powered by ZDot™ technology and multi-mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, and smooth to rough texture. It provides topographic step height, roughness and film thickness measurements along with True Color imaging, and diamond scribe marking of defect locations for off-line post-detection analysis. The Zeta family comprises benchtop and fully automated cassette-to-cassette wafer handling to support both R&D and production environments.

Nov 10, 2020 09:00 AM in Pacific Time (US and Canada)

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Speakers

Kurt Rubin
Applications Development Engineer @KLA Instruments
Kurt Rubin is an Applications Development Engineer at KLA Instruments where he focuses on advanced optical and electrical measurement and modeling. He has an extensive background in the invention of new optical, electrical and magnetic devices, materials and the development of new processes to fabricate them. He is an inventor of fundamental technology underlying multilayer optical storage and high-speed reversible memories. He holds 60 patents and degrees in physics and materials science from MIT, University of Washington and Stanford University.