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Recipe Development on the New F54-XY-200
The F54-XY-200 is a brand-new series of spectroscopic thin-film mapping systems that leverage high stage repeatability (+/- 1um), industry leading Filmetrics measurement technology, and easy-to-use pattern recognition capability. With spot size as small as 1um and spectrometer configurations covering wide wavelength range (190nm – 1700nm) these systems can be set up to measure almost all dielectric films, semiconductor films, photoresist, and even complex film stacks. This webinar will cover recipe setup for thickness and optical property mapping on blank wafers. We’ll also demonstrate how to set up pattern recognition recipes on common CMP test wafers.

Nov 17, 2020 11:00 AM in Pacific Time (US and Canada)

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Speakers

MIchelle Shi
Application Engineer @KLA Instruments