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Automated step height metrology for production process monitoring
Making automated measurements in a production fab requires more than just the capability to measure the feature of interest. The system must have precise measurement results to be able to control the process 24x7. The system must have good matching so that any system used will produce the same measurement results. The system must have seamless recipe transportability so that the recipe can be created on a single system or offline software and transferred to any system and operate as good as on the original recipe. Finally, the ability to seamless connect with factory host control for remote tool operation and connecting with factory statistical process control (SPC) systems.

Sep 22, 2020 11:00 AM in Pacific Time (US and Canada)

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Jeff Reichert
Product Marketing Manager @KLA Instruments
Jeff Reichert is the Senior Product Marketing Manager for the optical and stylus profilers in the KLA Instruments group. Jeff joined KLA-Tencor in June 2000 as an applications development engineer for the RS-100 sheet resistance and Flexus stress measurement product lines. Since joining KLA, Jeff has held various positions in applications development, product marketing, and applications management, supporting the Alpha-Step and Tencor benchtop stylus profilers, HRP fully automated high resolution profilers, MicroXAM interferometers, and Zeta optical profilers. Prior to joining KLA Jeff received a B.S. degree in Chemical Engineering from the University of California, Berkeley.