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Thickness Nonuniformity (NU): how to manage this uninvited guest
Previous Webinars have elicited several questions on this topic. First the sources of NU will be described. Then we’ll go through the menu of techniques to defeat this unwanted phenomenon: 1) small spot size by use of smaller optical fibers, SLED technology, and/or a microscope; 2) explicit modeling of the film NU; and 3) wavelength selection.

Dec 8, 2020 11:00 AM in Pacific Time (US and Canada)

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Speakers

Jim Elman
Applications Manager @KLA Instruments
Jim Elman is an Applications Manager of profiler and thin film products for Filmetrics (a KLA company). Previous to Filmetrics he worked at the Eastman Kodak Research Labs starting in 1978. There he was an expert in spectroscopic ellipsometry, spectral reflectance, adhesion science, and XPS. He joined Filmetrics in 2007 as a Senior Applications Engineer. Jim has a B.Sc. (Honours) from the University of Toronto and a Ph.D. (in polymer science) from the University of Connecticut. He has been granted 24 US patents.